Abstract

This dissertation presents the optimized designs and fabrication processes for MEMS inertial switches and microgrippers for biomedical applications. First, three types of MEMS inertial switches — bi-directional, quad-directional, and omni-directional — are developed to enhance the sensitivity for detecting concussive brain impacts. These designs ensure uniform, reliable sensitivity across all sensing directions for low-? applications.

Next, two MEMS microgrippers are introduced. The first uses an electrostatic actuator and a compliant mechanical amplifier with a capacitive sensor to provide precise, safe manipulation of sensitive micro-objects. The second utilizes an electrothermal actuator and a compliant mechanical amplifier designed to minimize heat, ensuring safe handling of sensitive micro-objects while achieving high displacement.

Finally, two MEMS fabrication processes optimized at the KAUST Nanofabrication Core Lab (NCL) are introduced. These processes enable in-house fabrication, demonstrating the versatility and capability of fabricating various MEMS devices with precision and reliability.

Biography

Yousef Algoos is currently a Ph.D. candidate in the Mechanical Engineering Program in PSE division under the supervision of Prof. Eric Feron and Prof. Mohammad I Younis. He received his BS/MS degrees in Mechanical Engineering from University of Alabama, USA in 2019. He started his PhD studies at KAUST in 2020 and his research interest is focused on the Nano/Micro Electro-Mechanical Systems (N/MEMS) and Nanofabrication of semiconductors, specializing in the design and fabrication of N/MEMS devices. He conducts in-depth research on the linear and nonlinear dynamics of these devices, thoroughly analyzing their vibrational behaviors to optimize performance and applications.