The potential of the fascinating micro/nano machines was appreciated very early (e.g. R. Feynman's famous lecture “There's Plenty of Room at the Bottom” back in 1959) but their realization became reality only when Micro and Nano Technologies (MNTs) were available. MNTs include a wide range of advanced techniques that allow the creation and characterization of functional devices with extremely small dimensions and are employed in the realization & characterization of devices and systems with dimensions ranging from several micrometers to a few nanometers. Partly because MNTs have been derived from the semiconductor industry, they provide immense and diverse capabilities including possible reduction in mass, low power consumption, low volume, high reliability and low cost.
We will review the suite of the major micro/nano technologies that are usually employed for the realization of micro/nano systems with emphasis in the related technologies & capabilities available at CoreLabs. In addition, we will present the design, fabrication and application of certain microsystems and how these units revolutionize our daily life.
Ioannis Raptis received his B.Sc. degree in Physics (1989) from University of Athens, Greece. His Ph.D. (University of Athens) was on electron beam lithography; the experimental part was carried out at IESS-CNR (Rome, Italy) and the theoretical part was carried out at NCSR-Demokritos (Athens, Greece). His Ph.D. work became a commercial product by Sigma-C GmbH and sold in industrial & academic sites in Europe and Japan. Then he worked at the Electronics department of the Technological Educational Institute of Athens as Assistant Professor. In 2003 he joined NCSR Demokritos as researcher and in 2013 he became Director of Research, on micro/nano technologies and electronic/photonic devices for bio(chem)sensing applications. In 2008 he co-founded ThetaMetrisis SA that design & manufacture tools for the non-destructive characterization of coatings with industrial & academic customers all over the world. He is/was Key Researcher and Coordinator for several highly competitive EU and national research projects in the areas of nanotechnology and microsystems with accumulated external funding for NCSR-Demokritos >2M€. He is program and steering committee member in several international conferences in the areas of sensors and microsystems and serves regularly as invited speaker in conferences/summer schools. He serves as associate editor in Optics & Laser Technology, IEEE Sensors, and Scientific Reports. He is author of >150 publications in international journals and holder of 4 patents.
He joined KAUST in October 2017 to stimulate further the micro/nanopatterning capabilities in Core Labs.